Extreme Ultraviolet Beam Profile Imaging with Nitrogen-Vacancy Centers in Nanodiamonds

Teng-I Yang^1*, Yuen-Yung Hui², Jen-Iu Lo³, Yu-Wen Huang², Yin-Yu Lee⁴, Tzu-Ping Huang⁴, Bing-Ming Cheng^3,5, Huan-Cheng Chang^2,6,7

¹Taiwan Instrument Research Institute, Hsinchu City, Taiwan
²Institute of Atomic and Molecular Sciences, Academia Sinica, Taipei City, Taiwan
³Department of Medical Research, Hualien Tzu Chi Hospital, Hualien City, Taiwan
⁴National Synchrotron Radiation Research Center, Hsinchu City, Taiwan
⁵Tzu-Chi University of Science and Technology, Hualien City, Taiwan
⁶Department of Chemical Engineering, National Taiwan University of Science and Technology, Taipei, Taiwan
⁷Department of Chemistry, National Taiwan Normal University, Taipei, Taiwan

* Presenter:Teng-I Yang, email:yongton72@gmail.com

Fluorescent nanodiamonds (FNDs) are carbon-based nanoparticles that contain nitrogen-vacancy (NV) centers, serving as highly advanced quantum sensors. Surprisingly, their potential as sensors in extreme ultraviolet (EUV) lithography, a crucial driver of Moore's Law advancement, has been relatively unexplored. Previous research has revealed the remarkable utility of FNDs in achieving high-performance detection of vacuum ultraviolet (VUV), EUV, and even X-rays. The emission profile from NV0 centers remains nearly constant within the 550-800 nm range, with no significant decrease in fluorescence intensity observed during hours of continuous exposure to 1010 photons per second. FNDs. This study represents a pioneering step in utilizing electrospray-deposited FND thin films for EUV imaging

Keywords: Above-bandgap excitation, Fluorescent nanodiamond, Photo-lithography, Scintillator, Synchrotron radiation